Scanning Probe Lithography

Springer Science & Business Media
Free sample

Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample. SPL is capable of patterning sub-30nm features with nanometer-scale alignment registration. It is a relatively simple, inexpensive, reliable method for patterning nanometer-scale features on various substrates. It has potential applications for nanometer-scale research, for maskless semiconductor lithography, and for photomask patterning.
The authors of this book have been key players in this exciting new field. Calvin Quate has been involved since the beginning in the early 1980s and leads the research time that is regarded as the foremost group in this field. Hyongsok Tom Soh and Kathryn Wilder Guarini have been the members of this group who, in the last few years, have brought about remarkable series of advances in SPM lithography. Some of these advances have been in the control of the tip which has allowed the scanning speed to be increased from mum/second to mm/second. Both non-contact and in-contact writing have been demonstrated as has controlled writing of sub-100 nm lines over large steps on the substrate surface. The engineering of a custom-designed MOSFET built into each microcantilever for individual current control is another notable achievement. Micromachined arrays of probes each with individual control have been demonstrated. One of the most intriguing new aspects is the use of directly-grown carbon nanotubes as robust, high-resolution emitters.
In this book the authors concisely and authoritatively describe the historical context, the relevant inventions, and the prospects for eventual manufacturing use of this exciting new technology.
Read more

Reviews

Loading...

Additional Information

Publisher
Springer Science & Business Media
Read more
Published on
Mar 14, 2013
Read more
Pages
197
Read more
ISBN
9781475733310
Read more
Language
English
Read more
Genres
Technology & Engineering / Electrical
Technology & Engineering / Electronics / Circuits / General
Technology & Engineering / Electronics / General
Technology & Engineering / Manufacturing
Technology & Engineering / Materials Science / General
Technology & Engineering / Technical & Manufacturing Industries & Trades
Read more
Content Protection
This content is DRM protected.
Read more

Reading information

Smartphones and Tablets

Install the Google Play Books app for Android and iPad/iPhone. It syncs automatically with your account and allows you to read online or offline wherever you are.

Laptops and Computers

You can read books purchased on Google Play using your computer's web browser.

eReaders and other devices

To read on e-ink devices like the Sony eReader or Barnes & Noble Nook, you'll need to download a file and transfer it to your device. Please follow the detailed Help center instructions to transfer the files to supported eReaders.
Charles Platt
"This is teaching at its best!"

--Hans Camenzind, inventor of the 555 timer (the world's most successful integrated circuit), and author of Much Ado About Almost Nothing: Man's Encounter with the Electron (Booklocker.com)

"A fabulous book: well written, well paced, fun, and informative. I also love the sense of humor. It's very good at disarming the fear. And it's gorgeous. I'll be recommending this book highly."

--Tom Igoe, author of Physical Computing and Making Things Talk

Want to learn the fundamentals of electronics in a fun, hands-on way? With Make: Electronics, you'll start working on real projects as soon as you crack open the book. Explore all of the key components and essential principles through a series of fascinating experiments. You'll build the circuits first, then learn the theory behind them!

Build working devices, from simple to complex You'll start with the basics and then move on to more complicated projects. Go from switching circuits to integrated circuits, and from simple alarms to programmable microcontrollers. Step-by-step instructions and more than 500 full-color photographs and illustrations will help you use -- and understand -- electronics concepts and techniques.

Discover by breaking things: experiment with components and learn from failure Set up a tricked-out project space: make a work area at home, equipped with the tools and parts you'll need Learn about key electronic components and their functions within a circuit Create an intrusion alarm, holiday lights, wearable electronic jewelry, audio processors, a reflex tester, and a combination lock Build an autonomous robot cart that can sense its environment and avoid obstacles Get clear, easy-to-understand explanations of what you're doing and why
©2017 GoogleSite Terms of ServicePrivacyDevelopersArtistsAbout Google
By purchasing this item, you are transacting with Google Payments and agreeing to the Google Payments Terms of Service and Privacy Notice.