MEMS Materials and Processes Handbook

Reza Ghodssi · Pinyen Lin

2011年3月 · MEMS Reference Shelf 第 4 本图书 · Springer Science & Business Media

关于此电子书

MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.