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The requirements of high precision and of high-quality components and devices in meeting the needs of modern industry and society in disciplines such as semiconductors, optics, nanotechnology, MEMS, manufacturing, biomedical and environmental engineering, make measurement technology and intelligent instruments (which sense, measure and report), more important than ever, and essential for the rapid development of information technology. Following the lead of the previous five publications (1989, 1993, 1996, 1998, 2001) in the series, “Measurement Technology and Intelligent Instruments”, this book presents the most recent advances in this important field. In all, 123 papers were contributed from many regions of the world; including China, Taiwan (China), Japan, Russia, Hong Kong (China), Germany, Australia, Austria, Canada, Korea, Poland, Slovakia and the UK and US.
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