Applications of Piezoelectric Quartz Crystal Microbalances

C. Lu · A.W. Czanderna

Dec 2012 · Methods and Phenomena Book 7 · Elsevier

About this ebook

Applications of Piezoelectric Quartz Crystal Microbalances deals with the theory, design, artifacts, and varied applications of the piezoelectric quartz crystal microbalance. Applications of microbalances range from thin film deposition process control to simultaneous measurement of mass and temperature, analytical chemistry, and space system contamination studies. Stress effects in microbalances are also considered. Comprised of 10 chapters, this volume begins with a historical background and overview of applications of piezoelectric quartz crystal microbalances, followed by an analysis of the theory and practice of microbalances. The role of acoustic impedance in a quartz crystal microbalance and design considerations for a microbalance are given emphasis. Subsequent chapters focus on applications of microbalances in thin film deposition process control; simultaneous measurement of mass and temperature; surface science and analytical chemistry; plasma-assisted etching and space system contamination studies; and aerosol mass measurement. This monograph will be of interest to students and practitioners of physics, chemistry, and materials science.

About the author

Dr. Cong Lu is currently an associate Professor in the School of Mechatronics Engineering, University of Electronic Science and Technology of China. Dr. Lu’s research interests include collaborative design and assembly, concurrent Engineering, and CAD/CAM. Dr. Lu has published many research papers in the reputable international journals, such as ASME Journal of Computing and Information Science in Engineering, IMechE Journal of Engineering Manufacture, International Journal of Production Research.